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Effect of thermal annealing in vacuum and in air on nanograin sizes in hard and superhard coatings Zr-Ti-Si-N.

Journal of nanoscience and nanotechnology

Pogrebnjak AD, Shpak AP, Beresnev VM, Kolesnikov DA, Kunitskii YA, Sobol OV, Uglov VV, Komarov FF, Shypylenko AP, Makhmudov NA, Demyanenko AA, Baidak VS, Grudnitskii VV.
PMID: 23447980
J Nanosci Nanotechnol. 2012 Dec;12(12):9213-9. doi: 10.1166/jnn.2012.6777.

Zr-Ti-Si-N coating had high thermal stability of phase composition and remained structure state under thermal annealing temperatures reached 1180 degrees C in vacuum and 830 degrees C in air. Effect of isochronous annealing on phase composition, structure, and stress...

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